主要技術參數與配置：
1.真空室容積：φ1250*1200
2.工位：16個或18個，工件回轉最大直徑160mm
3.靶、?。和ㄓ媒涌谠O計，可按需配置
4.推薦配置：4對70靶+10支弧靶的IP黑機型或1對φ100靶+2支平面靶+10支弧靶的IP金機型
Configuration：
Ⅰ.Vacuum chamber volume：Φ1250mm*h1200mm
Ⅱ.station：16or18，Maximum diameter of workpiece rotation：160mm
Ⅲ.Target, arc: general interface design, can be configured on demand
Ⅳ.Recommended configuration: 4 pairs of 70 target +10 arc target IP black model or 1 pairs of 100 target +2 support plane target +10 arc target IP gold model.
