立式傳動結構，驅動全部采用伺服電機，可柔性控制基片運行速度及相鄰基片位置關系，該設備主要用于CIGS太陽能薄膜電磁的Mo層（背電極層）及ZnO+ZnS、AZO層（窗口層）的沉積。

The vertical drive structure, the drive all uses the servo motor, can control the operating speed of the substrate flexible and the relationship between the adjacent substrate position. The equipment is mainly used for the deposition of the Mo layer (back electrode layer) of the CIGS solar film and the ZnO+ZnS and AZO layer (window layer).