主要技術參數與配置：

1.真空室容積：φ1688*1200
2.工位：20個/24個/28個或按需提供，工件回轉最大直徑180mm
3.可裝可移動平面靶：2支
4.上蓋預留：8對φ70靶位，其中門兩側4對可與2對φ100靶互換
5.中間兩側可裝10套電弧靶或2支線性離子源

Configuration：

Ⅰ.Vacuum chamber volume：Φ1688mm*h1200mm
Ⅱ.station：20/24/28 or provided on demand，Maximum diameter of workpiece rotation：180mm
Ⅲ.Movable plane target：2
Ⅳ.The upper cover is reserved: 8 pairs of φ70 targets, 4 pairs on both sides of the door can be exchanged with 2 pairs of target φ100.
Ⅴ.10 sets of arc targets or 2 linear ion sources can be installed on both sides.