主要技術參數與配置：
 

1.真空室容積：φ1180*1100
2.可移出式轉架：無需定位，可任意位置移出，傳動可靠（專利技術）
3.平面靶及離子源：六等分通用接口，可按需配置平面靶及離子源數量
4.工位：12個，或按需提供

Configuration：

Ⅰ.Vacuum chamber volume：Φ1180mm*800mm
Ⅱ.Movable type carousel
Ⅲ.Flat target and ion source: six equal division general interface,
     the number of flat targets and ion sources can be allocated as required.
Ⅳ.Station：12，or provided on demand

技術特點：

該系列設備主要用于模具、刀具或汽車、縫紉機等零配件表面沉積耐磨涂層和潤滑涂層、涂層產品表面硬度可大幅提高、達到2000HV以上，并擁有極低的摩擦系數（0.1-0.2），明顯減少加工中產生的刮痕及摩擦，大幅提高產品質量。
 
Technical feature:

This series of equipment is mainly used for the surface deposition and wear-resisting coating and lubricating coating of the parts of the mould, cutting tool or automobile and sewing machine. The surface hardness of the coating product can be raised to more than 2000HV, and has a very low friction coefficient (0.1-0.2), which obviously reduces the scratch and friction produced in the processing, and greatly improves the quality of the product.